Canon
FPA 5500 iZa i-Line
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Canon FPA 5500 iZa is an i-line stepper lithography system for 8-inch wafers. The FPA 5500 iZa is configured as a wide-field exposure stepper.[1][2]
What it is
How it works
General reference — not yet source-verifiedA stepper lithography system transfers a mask pattern onto photoresist on a wafer by projecting exposure light through optical reduction and alignment controls.
An i-line lithography system uses the i-line portion of mercury lamp exposure for pattern transfer in mature semiconductor fabrication.
Where it fits in the process flow
General reference — not yet source-verifiedThe Canon FPA 5500 iZa i-Line sits in the lithography module of wafer fabrication, where it defines circuit patterns before resist development and subsequent etch or deposition transfer steps.
Applications
What do the numbers mean?
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Nikon NSR SF 155 i-Line— Same function class: Lithography, nullCompare in depthsource[1]
- Nikon SF 130— Same function class: Lithography, nullCompare in depthsource[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What type of tool is the Canon FPA 5500 iZa i-Line?
The Canon FPA 5500 iZa i-Line is an i-line stepper used for semiconductor lithography.[2]
Not publicly documented
The following facts about the FPA 5500 iZa i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FPA 5500 iZa i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the FPA 5500 iZa i-Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the FPA 5500 iZa i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the FPA 5500 iZa i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the FPA 5500 iZa i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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The Nikon NSR SF 155 is an i-line stepper with a 12-inch wafer size.
The Nikon SF 130 is a lithography stepper with an i-line 365 nm exposure wavelength and support for 200 mm wafer exposure.