Canon
Anelva C 7100 PVD Cluster
The Canon Anelva C7100 PVD Cluster is a physical vapor deposition system for 8-inch wafers. The Canon Anelva C7100 PVD Cluster includes triple transfer chambers with Brooks Magna-Tran robots. The Canon Anelva C7100 PVD Cluster features multiple process modules including CIS CH-A, Etch/OXI-EX, 8PVD-EX, 5PVD-EX, Cooling, RTA, and others.[1]
What it is
The Canon Anelva C 7100 PVD Cluster is a physical vapor deposition system for semiconductor processing.[1][2]
The Canon Anelva C 7100 is configured for eight-inch wafers.[1]
How it works
The Canon Anelva C 7100 includes triple transfer chambers with a loadlock and cluster-to-cluster transport, and the system uses Brooks Magna-Tran robots for wafer movement between modules.[1]
The Canon Anelva C 7100 includes multiple process modules, including CIS CH-A, Etch/OXI-EX CH-B, 8PVD-EX CH-E, 5PVD-EX CH-F, 8PVD-EX CH-1A, Cooling CH-1B, RTA CH-1C, 4/4PVD-1D, and 4PVD-EX CH-1F.[1]
Applications
The Canon Anelva C 7100 is used for sputtering deposition and related physical vapor deposition workflows.[2][1]
What do the numbers mean?
Vacuum & pumping14
- CIS CH-A process module w/ Shimadzu TMP turbo pump[1]
- Etch/OXI-EX (CH-B) process module w/ Inficon Transpector XPR3 RGA, Shimadzu TMP-3203LM-N1 turbo pump[1]
- 8PVD-EX (CH-E) process module w/ CTI Cryogenics PowerEco cryopump[1]
- 5PVD-EX (CH-F) process module w/ Shimadzu TMP turbo pump[1]
- 8PVD-EX (CH-1A) process module, w/ cryopump[1]
- 4/4PVD-1D process module w/ Anelva P-126CL turbopump[1]
- 4PVD-EX (CH-1F) process module w/ CTI Cryogenics PowerEco cryopump[1]
- Process module CH-B
- Etch/OXI-EX (CH-B) process module with Inficon Transpector XPR3 RGA, Shimadzu TMP-3203LM-N1 turbo pump[1]
- Process module CH-1F
- 4PVD-EX (CH-1F) process module with CTI Cryogenics PowerEco cryopump[1]
Wafer handling3
Configuration & options4
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationCIS CH-A process module w/ Shimadzu TMP turbo pump[1]
- ConfigurationEtch/OXI-EX (CH-B) process module w/ Inficon Transpector XPR3 RGA, Shimadzu TMP-3203LM-N1 turbo pump[1]
- Configuration8PVD-EX (CH-E) process module w/ CTI Cryogenics PowerEco cryopump[1]
- Configuration5PVD-EX (CH-F) process module w/ Shimadzu TMP turbo pump[1]
- Configuration8PVD-EX (CH-1A) process module, w/ cryopump[1]
- Configuration4/4PVD-1D process module w/ Anelva P-126CL turbopump[1]
- Configuration4PVD-EX (CH-1F) process module w/ CTI Cryogenics PowerEco cryopump[1]
- Process module CH-ACIS CH-A process module with Shimadzu TMP turbo pump[1]
- Process module CH-BEtch/OXI-EX (CH-B) process module with Inficon Transpector XPR3 RGA, Shimadzu TMP-3203LM-N1 turbo pump[1]
- Process module CH-E8PVD-EX (CH-E) process module with CTI Cryogenics PowerEco cryopump[1]
- Process module CH-F5PVD-EX (CH-F) process module with Shimadzu TMP turbo pump[1]
- Process module CH-1A8PVD-EX (CH-1A) process module with cryopump[1]
- Process module CH-1D4/4PVD-1D process module with Anelva P-126CL turbopump[1]
- Process module CH-1F4PVD-EX (CH-1F) process module with CTI Cryogenics PowerEco cryopump[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Anelva C 7100 PVD Cluster are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Anelva C 7100 PVD Cluster are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Anelva C 7100 PVD Cluster are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Anelva C 7100 PVD Cluster are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Anelva C 7100 PVD Cluster are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Anelva C 7100 PVD Cluster is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]Canon/Anelva C7100 PVD, SPUTTERING SYSTEMS | SemiStar — semistarcorp.comsemistarcorp.com
Last updated Oct 5, 2026.
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