Bruker
Jordan Valley JVX 5200 T X-ray Reflectometer
The Bruker / Jordan Valley JVX 5200 T X-ray Reflectometer is an X-ray metrology system that combines XRF and XRR measurement capabilities. The Bruker / Jordan Valley JVX 5200 T X-ray Reflectometer uses a Brooks Series 8 loadport for 12 inch wafers.[1]
How it works
The JVX 5200 T operates under a multi-computer control architecture running separate operating systems for different subsystems. A main computer runs Microsoft Windows XP Professional Service Pack 2 with operator software version JVX5200T / 753nEXT Ver.1.9.6.1. A dedicated MCD computer runs Microsoft Windows 98 Second Edition with MCD Controller Application 4.2 b 0001, and a JVXXR computer runs Microsoft Windows 2000 Service Pack 4. The tool has a reported cooling problem that may originate from a defective compressor or filter.[1]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Tool has a cooling problem (may be the respective compressor/filter defect)
What do the numbers mean?
Vacuum & pumping2
- Cryo Tiger Cooling System[1]
Wafer handling2
- Brooks Robot[1]
Control & software7
Configuration & options12
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Jordan Valley JVX 5200 T X-ray Reflectometer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Jordan Valley JVX 5200 T X-ray Reflectometer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Jordan Valley JVX 5200 T X-ray Reflectometer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Jordan Valley JVX 5200 T X-ray Reflectometer are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Jordan Valley JVX 5200 T X-ray Reflectometer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Jordan Valley JVX 5200 T X-ray Reflectometer are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Oct 8, 2026.
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