Bruker
Dimension Fastscan
The Dimension Fastscan is a Bruker atomic force microscope. The Dimension Fastscan is designed for high-speed scanning without loss of resolution or force control. The Dimension Fastscan supports AFM imaging and analysis in air and fluid.[1][2]
Vacuum
210mm vacuum chuck for samples[3]
Performance
2um repeatability, unidirectional[3]
Optics
Microscope optics:[3]
What it is
How it works
The Dimension Fastscan uses a laser feedback system focused on a sharp probe that is scanned over the sample surface. The system supports both the FastScan head for high-speed topographical scanning and the Icon scan head for larger scan areas and additional advanced surface analysis modes.[2][1]
The Dimension Fastscan supports a broad mode set that includes ScanAsyst, TappingMode in air and fluid, Contact Mode, PhaseImaging, Lateral Force Microscopy, Lift Mode, MFM, EFM, Force Spectroscopy, Force Volume, and Nanomechanical Mapping. The Fastscan Pro variant also uses NanoScope 6 controller architecture and AutoMET recipe software for automated or semi-automated measurement workflows.[3][4][5]
Where it fits in the process flow
Applications
The Dimension Fastscan is used for surface topography, roughness, defect review, nanomechanical mapping, electrical characterization, magnetic characterization, and force spectroscopy. The system supports analysis modes that include conductive mapping, electrostatic mapping, piezoresponse microscopy, and nanolithography on supported configurations.[3][1][5]
The Dimension Fastscan Pro is used for semiconductor, data storage, and high-brightness LED measurement work. The system also supports measurements on soft polymers, thin films, electrical samples, hard materials, wafers, substrates, and sliders.[4][5]
What do the numbers mean?
Power & electrical4
- X-Y position noise (closed -loop)
- =0.20nm RMS typical imaging BW (up to 2.5kHz in adaptive)[3]
Vacuum & pumping4
Wafer handling2
Optics & imaging5
Performance2
Control & software4
Dimensions & facilities1
Configuration & options27
- Sample size/holder:[3]
- =210mm in diameter, =15mm thick[3]
- magnet holder[3]
- AFM modes
- Standard, ScanAsyst, Nanomechanical Mapping, TappingMode (air), TappingMode (fluid), PhaseImaging, Contact Mode, Lateral Force Microscopy, Lift Mode, MFM, EFM, Force Spectroscopy, Force Volume[3]
- Purpose
- Scanning probe microscopy of various sample types; equipped with FastScan and ICON scanners[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- X-Y position noise (closed -loop)=0.20nm RMS typical imaging BW (up to 2.5kHz in adaptive)[3]
- Configuration210mm vacuum chuck for samples[3]
- Configuration300mm vacuum chuck[3]
- Vertical noise floor< 40 pm RMS, sensor in appropriate environment (up to 625 Hz)[3]
- X-Y position noise= 0.20 nm RMS typical imaging BW (up to 2.5 kHz in adaptive)[3]
- Sample size/holder210 mm vacuum chuck for samples; <= 210 mm in diameter; <= 15 mm thick[3]
- Additional sample handling300 mm vacuum chuck; magnet holder[3]
- Scan rate> 125 Hz when surveying a sample; 1-second per image frame in air or fluid[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Dimension Fastscan are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Dimension Fastscan are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Dimension Fastscan are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Dimension Fastscan are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Dimension Fastscan are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Dimension Fastscan is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]bruker.com — bruker.combruker.com
- [2]uwaterloo.ca — uwaterloo.cauwaterloo.ca
- [3]Inventory photo
- [4]Dimension FastScan Pro | Bruker — bruker.combruker.com
- [5]https://cdn.labwrench.com/eMan/manualNo/10579/bruker_optics_dimension_fastscan_pro_brochure.pdf — cdn.labwrench.comcdn.labwrench.com
Last updated Oct 5, 2026.
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