Applied Materials
SEMVision G 3
Applied Materials SEMVision G 3 is an inspection system. Applied Materials SEMVision G 3 handles 8-inch and 12-inch wafers. Applied Materials SEMVision G 3 includes a SEM column and an EDX column.[1][2]
What it is
General reference — not yet source-verifiedDefect review scanning electron microscopes (DR-SEMs) are automated metrology and inspection tools that provide high-resolution imaging and classification of defects on semiconductor wafers. The Applied Materials SEMVision G 3 is a model in this class.
How it works
General reference — not yet source-verifiedA defect review SEM directs a focused electron beam onto a defect site and detects secondary or backscattered electrons to form a high-magnification image. The system includes automated defect review and automated defect classification capabilities to identify defect types without operator intervention.
What do the numbers mean?
Wafer handling9
- FFU with ULPA Filter; SEM column; EDX column; 45 Deg column Tilt; Wafer Rotation option included; Stage wafer holder; ESC ETU 300mm / 200mm; ITU 300mm / 200mm; Aligner; Optical Microscope X5, X20, X100[1]
Optics & imaging6
Performance3
- System performance
- ITU Repeatability: Delta X and Delta Y < 20 μm; Stage accuracy: Delta X and Delta Y < 1.5 μm; MTR: Delta X = 50 μms; Delta Y = 30 μms[1]
Control & software1
- Software and workstation:[1]
Configuration & options13
Parts & consumables
Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.
- Applied Materials SEMVision G 3 Fuel Graphics CardIn Productionsource[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the SEMVision G 3 handle?
What is the imaging resolution at 1 keV?
The resolution at 1 keV is 3 nm.[1]
What is the wafer throughput?
The wafer throughput is 15 wafers per hour, and the defect throughput is greater than 1800 defects per hour.[1]
Not publicly documented
The following facts about the SEMVision G 3 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SEMVision G 3 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SEMVision G 3 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SEMVision G 3 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SEMVision G 3 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SEMVision G 3 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Equipment inventory listing
Last updated Oct 11, 2026.
Compare with similar tools
View all →The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
