Applied Materials

Centura 5200 DXZ

Applied Materials Centura 5200 DXZ family

Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

The Applied Materials Centura 5200 DXZ is a chemical vapor deposition (CVD) system. The system is configured for plasma-enhanced chemical vapor deposition (PECVD) and sub-atmospheric chemical vapor deposition (SACVD) processes.^[1]^[2]

What do the numbers mean?

Wafer handling1

Wafer Size: 200 mm^[1]

Gas & chemistry2

Chemistry (SACVD variant): TEOS^[2]
Description: PECVD (Chemical Vapor Deposition)^[1]

Configuration & options7

Process Type (available): PECVD, SACVD^[1]
Number of Chambers (SACVD variant): 3^[2]
OEM: Applied Materials^[3]
Model: Centura 5200 DXZ^[3]
Description: DxZ SACVD 3 chamber TEOS CVD system^[2]
Version: 200 mm^[1]
Vintage: 01.06.1997^[2]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
Centura 5200 DxZ PECVD	—	—	PECVD process configuration	fabsurplus.com^[1]
Centura 5200 DxZ SACVD	—	—	SACVD process, 3 chambers, TEOS chemistry	fabsurplus.com^[2]

Interested in this tool?

Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Chemistry (SACVD variant)TEOS^[2]
DescriptionPECVD (Chemical Vapor Deposition)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What is the exact model designation of this equipment?

The model is the Applied Materials Centura 5200 DXZ (also written as Centura 5200 DxZ).^[3]^[1]^[2]

Not publicly documented

The following facts about the Centura 5200 DXZ are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura 5200 DXZ are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Centura 5200 DXZ are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Centura 5200 DXZ are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Centura 5200 DXZ is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Centura 5200 DXZ are on record.
Answerable by: an OEM parts catalog or a service engineer