Advanced Energy
RFX 600
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Advanced Energy RFX 600 is a 600-watt, 13.56 MHz RF generator. The RFX 600 includes CE certification and a power correction factor. The RFX 600 is used in plasma etching, PECVD, RF sputtering, and RF biasing applications.[1]
Where it fits in the process flow
The RFX series power supplies are used for plasma etching, plasma-enhanced chemical vapor deposition (PECVD), RF sputtering, and RF biasing.[1]
Applications
Plasma etching, PECVD, RF sputtering, and RF biasing are typical applications for the RFX series generators.[1]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Power cord needs replacing
What do the numbers mean?
Power & electrical2
Configuration & options12
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| RFX 600 with ATX 600 | — | — | Listed as "With ATX 600". | Equipment inventory listing[4] |
| RFX 600 / 5002-000-B | — | — | Listed with model number 5002-000-B. | Equipment inventory listing[5] |
| 5002-000-B | — | — | — | Equipment inventory listing[5] |
| RFX 600 Model 5002-000-B | — | — | Specific model number variant | Equipment inventory listing[5] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the output power of the RFX 600?
The RFX 600 provides 600 watts of RF power.[1]
What are the typical applications of the RFX 600?
The RFX 600 is used in plasma etching, PECVD, RF sputtering, and RF biasing.[1]
What types of impedance-matching networks are compatible with the RFX 600?
The RFX 600 is designed to work with the AZX and VZX series impedance-matching networks from Advanced Energy.[1]
Not publicly documented
The following facts about the RFX 600 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RFX 600 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the RFX 600 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the RFX 600 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the RFX 600 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the RFX 600 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]web.archive.org — advanced-energy.com (May 1, 1998)web.archive.org
- [2]Inventory photo
- [3]Inventory photo
- [4]inventory listing
- [5]inventory listing
Last updated Sep 24, 2026.