Accretech
UF3000 Fully Automated
What it is
The Accretech (formerly Tokyo Semitsu Kogaku, TSK) UF3000 is a fully automatic wafer probing machine. The machine supports both 200 mm and 300 mm wafers on a single load port. The total alignment accuracy of the system is within ±2 μm. The UF3000 was developed as a standard model for semiconductor testing, suitable for both high-mix low-volume production and mass production.[2]
Where it fits in the process flow
Applications
The primary application of the UF3000 is semiconductor wafer testing, including parametric test, functional test, and wafer-level reliability (WLR) testing. The temperature-controlled chuck enables testing at elevated or reduced temperatures to evaluate device performance under various thermal conditions.[3][1]
What do the numbers mean?
Wafer handling6
Optics & imaging1
Performance2
Control & software2
Configuration & options12
Observed configurations
How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.
Unit as listed[1]
- Chuck temperature range 30~150°C
- Nickel chuck 12 inch
- Front 300 mm Single FOUP loading
- Dual ceramic robot blade
- s/w version S5.0FC4
- Loader Type: TSK
- OCR Camera Type: Type6
- Auto Card Change: Yes
- Needle Cleaning Unit: 150mm x 150mm Ceramics Pad
- Manipulator: Hinge, MHF4000
- Test System Interface: AL6050 & Focus3000
- INCLUDES PRINTER
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Tokyo Electron Precio XL— Same function class: Test & Probe, nullCompare in depthsource[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the UF3000 support?
The UF3000 supports 200 mm and 300 mm wafers on one load port.[2]
Not publicly documented
The following facts about the UF3000 Fully Automated are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the UF3000 Fully Automated are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the UF3000 Fully Automated are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the UF3000 Fully Automated are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the UF3000 Fully Automated are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the UF3000 Fully Automated is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]dealer listingfabsurplus.com
- [2]prober.com — prober.comprober.com
- [3]junr.com.cn — junr.com.cnjunr.com.cn
- [4]Equipment inventory listing
Last updated Oct 9, 2026.
Compare with similar tools
View all →
Tokyo Electron Precio XL is a prober described with single open with open loader, focus OCR, hot chuck, WAPP, 93K DD interface, Flip SACC, and GPIB.
The KLA 1007 is a wafer prober manufactured by KLA.
The Electroglas 1034 Prober is a semiconductor wafer prober manufactured by Electroglas.
