Varian 3118

Models in this family

1. 

   3118

   The Varian 3118 is an electron beam evaporator system used for semiconductor thin film deposition, optical coating, and advanced materials research.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   3118 10 E E-Beam	—	—	Listed as a separate model in the Varian 3118 family, with integrated vacuum pumps, chamber, mounting pieces, chiller, power unit, sweep controller, and optical monitor.	waferpedia.com[1]

Sources