Waferpedia

Tool family

Tystar Bank2

TystarDeposition1 entry

The Tystar Bank2 is a chemical vapor deposition (CVD) system used for depositing TEOS-based silicon dioxide films.

LinkedIn X Email

Models in this family

  1. Bank2

    The Tystar Bank2 is a chemical vapor deposition (CVD) system used for depositing TEOS-based silicon dioxide films.