Tool family
The Tokyo Electron WDF Frame is a fully automatic dicing frame prober designed for probing wafers and devices on dicing frames without requiring a change kit.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| WDF 12DP+ | — | — | Latest dicing frame prober supporting 300mm wafers and 300mm dicing frames with no change kit; features N-Shot alignment, improved ESD capability, and optional 8-inch conversion kit for 200mm substrates. | tel.com[1] |
| WDF 8 | — | — | Supports 200mm wafers and 200mm dicing frames with ball screw stage, XY probing accuracy ±4.0 µm, Z probing accuracy ±5.0 µm, probing force 60 kg. | tel.com[1] |