Waferpedia

Tool family

Tokyo Electron A 8

Tokyo ElectronThermal / Diffusion3 entries
LinkedIn X Email

Models in this family

  1. A 8 Batch Thermal Processing

    The Tokyo Electron A 8 is a batch thermal processing system manufactured in 1998.

  2. A 8 S D LPCVD Vertical
  3. A 8 S ZA

    The Tokyo Electron A 8 S ZA is a PoCl3 furnace with an EPROM based control system.

All entries

  1. A 8 Batch Thermal ProcessingTokyo Electron

    The Tokyo Electron A 8 is a batch thermal processing system manufactured in 1998.

    2 specs
  2. A 8 S D LPCVD VerticalTokyo Electron
    CategoryThermal / Diffusion
    3 specs
  3. A 8 S ZATokyo Electron

    The Tokyo Electron A 8 S ZA is a PoCl3 furnace with an EPROM based control system.

    CategoryThermal / Diffusion
    11 specs