Waferpedia

Tool family

Strasbaugh 6 DE 4 Spindle

StrasbaughCMP1 entry

Strasbaugh 6 DE 4 Spindle Polisher.

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Models in this family

  1. 6 DE 4 Spindle

    The Strasbaugh 6 DE 4 Spindle is a CMP polisher configured with a 4 Bank Overarm arrangement.