Waferpedia

Tool family

Strasbaugh 6 DE 4 Overam Spindle

StrasbaughCMP1 entry

Strasbaugh 6 DE 4 Overam Spindle Polisher.

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Models in this family

  1. 6 DE 4 Overam Spindle

    The Strasbaugh 6 DE 4 Overam Spindle is a polisher configured as a 4-bank system.