Waferpedia

Tool family

Pfeiffer SplitFlow 350

Pfeiffer1 entry

The Pfeiffer SplitFlow 350 is a compact turbomolecular vacuum pump designed for high gas throughput and demanding industrial processes.

Models in this family

  1. The Pfeiffer SplitFlow 350 is a compact turbomolecular vacuum pump designed for high gas throughput and demanding industrial processes.