Waferpedia

Tool family

Pfeiffer HiPace300

Pfeiffer1 entry

The Pfeiffer HiPace300 is identified in the source as the turbo pump used in the loadlock of the EVA 451 evaporator system.

Models in this family

  1. The Pfeiffer HiPace300 is a turbo pump used as the secondary pump in the loadlock of the Alliance-Concept EVA 451 thermal evaporator.