Waferpedia

Tool family

Optorun OTFC 1550 Optical

Models in this family

  1. The Optorun OTFC 1550 Optical is an optical coater or optical thin film coater in the OTFC series.

    Cited variants

    DesignationGenerationVintageChangesSource
    OTFC-1550CBI/DBI——Vacuum chamber SUS304, φ1550mm×1800mm (H); substrate dome size φ1400mm; rotation speed 10 rpm to 30 rpm; HOM2-R-VIS350A optical monitor; XTC/3 plus 6-point rotary sensor; 2 EB sources; 17 cm RF ion source; roughing pump, 2 diffusion pumps plus Polycold or 2 cryo pumps plus cryo trap.allwin21.com[1]
    OTFC-900CBI/DBI——Vacuum chamber SUS304, φ900mm×1300mm (H); substrate dome size φ790mm; rotation speed 10 rpm to 30 rpm; HOM2-R-VIS350A optical monitor; XTC/3 plus 6-point rotary sensor; 2 EB sources; 10 cm RF ion source; mechanical pump plus 1 diffusion pump plus Polycold or 1 cryo pump.optorun.sh.cn[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]allwin21.comallwin21.com
  2. [2]optorun.sh.cnoptorun.sh.cn