Nikon 1505

Models in this family

1. 1505

   Nikon 1505 is referenced in a lithography process condition as a g-line exposure tool with 0.54 NA.

2. 

   1505 G 6 Eproduced 1988–

   The Nikon 1505 G 6 E is a g-line stepper introduced in 1988 with a numerical aperture of 0.54 and a resolution of 650 nm.

3. 

   1505 G 7 E

   The Nikon 1505 G 7 E is a stepper used in lithography on 6-inch wafers with a 5-inch reticle.