Waferpedia

Tool family

MPI ThermalAir TA 5000 A Temperature Forcing

MPI1 entry

MPI ThermalAir TA 5000 A Temperature Forcing System.

Models in this family

  1. The MPI ThermalAir TA 5000 A Temperature Forcing System is a temperature forcing system with continuous air flow up to 25 SCFM and a temperature range from -80°C to +225°C.