Waferpedia

Tool family

Laurell WS-650-8B

LaurellResist Processing1 entry

The Laurell WS-650-8B is a spin coater in the 650 Series with a maximum substrate size of ø200mm (7" x 7") and a maximum speed of 12,000 rpm.

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Models in this family

  1. WS-650-8B

    The Laurell WS-650-8B is a spin coater in the 650 Series with a maximum substrate size of ø200mm (7" x 7") and a maximum speed of 12,000 rpm.