Lam Research Gasonics

Models in this family

1. 

   Gasonics A 1000
2. 

   Gasonics Gamma 2130 Photoresist Stripper

   The Lam / Novellus / Gasonics Gamma 2130 is a photoresist stripper with source-described system and process chamber configurations.

3. Gasonics L 3300

   The Lam / Novellus / Gasonics L 3300 is an asher for 6-inch wafers.

4. 

   Gasonics L 3510

   The Lam / Novellus / Gasonics L 3510 is a plasma asher.

5. 

   Gasonics Triple Speed NF

   The Lam / Novellus / Gasonics Triple Speed NF is a chemical vapor deposition (CVD) system with three HDP chambers, a Brooks robot, SLM type, three ports, and loadlock helium reduction.

6. 

   Gasonics Vertical High Pressure (VHP)
7. 

   Gasonics VHP Horizontal

   The Lam / Novellus / Gasonics VHP is a horizontal furnace for 8-inch (200 mm) wafers.