Lam Research AutoEtch 490 plasma etcher plasma etch semiconductor

Models in this family

1. AutoEtch 490 plasma etcher plasma etch semiconductor

   The Lam AutoEtch 490 is an in-line, cassette to cassette, fully automated, single wafer, double air-locked, parallel plate plasma etching system.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Poly machine	—	—	Includes CCL4 tank for liquid process chemistry	semistarcorp.com[1]

Sources