KLA Puma 9130

Models in this family

1. 

   Puma 9130

   The KLA Puma 9130 is a metrology and inspection tool from KLA.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Puma 9130 Darkfield Defect	—	—	Described as a darkfield defect inspection system.	waferpedia.com[1]

2. Puma 9130 Darkfield Defect

   KLA Puma 9130 Darkfield Defect Inspection System is a darkfield defect inspection system from KLA.

Sources