Waferpedia

Tool family

Karl Suss SB8

Karl SussBackend1 entry

The Karl Suss SB8 Wafer Bonder supports silicon fusion, anodic, and eutectic bonding.

Models in this family

  1. The Karl Suss SB8 Wafer Bonder supports silicon fusion, anodic, and eutectic bonding.

    Cited variants

    DesignationGenerationVintageChangesSource
    SB8 Gen2Gen2—Semi-automated universal wafer bonding system capable of handling wafers up to 200 mm; supports fusion, eutectic, diffusion, anodic, anodic triple stack, and adhesive bonding; temperature range 30–500 °C, ramp rate up to 30 K/min; bond force 300 N to 20 kN; footprint 1.2 m x 0.6 m; features Sequential Spacer Removal (SSR) for precise post-bond alignment.suss.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]suss.comsuss.com