Waferpedia

Tool family

ENI GHW

ENI1 entry

Models in this family

  1. The ENI GHW is an RF generator, and the ENI GHW-12A is a 13.56MHz 1250W RF generator.

    Cited variants

    DesignationGenerationVintageChangesSource
    GHW-12A———power19.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]power19.compower19.com