Waferpedia

Tool family

Bruker Dektak

Models in this family

  1. The Dektak150 is an advanced surface texture measuring system which accurately measures surface texture below submicro-inch and film thickness to 1000μm.

  2. The Bruker Dektak 8 is a contact profilometer capable of measuring vertical steps from tens of nanometers to 1mm in depth, with scan lengths up to 50mm, and can accommodate samples as large as 8-inch wafers.

  3. The Bruker / Veeco Dektak XT is a profilometer with a 4-inch stage, software-controlled movement, a 12.5-micron stylus diameter, and an included enclosure.

All entries

  1. Dektak 150Bruker

    The Dektak150 is an advanced surface texture measuring system which accurately measures surface texture below submicro-inch and film thickness to 1000μm.

    CategoryMetrology & Inspection
    19 specs
  2. Dektak 8Bruker

    The Bruker Dektak 8 is a contact profilometer capable of measuring vertical steps from tens of nanometers to 1mm in depth, with scan lengths up to 50mm, and can accommodate samples as large as 8-inch wafers.

    CategoryMetrology & Inspection
    5 specs
  3. Dektak XTBruker

    The Bruker / Veeco Dektak XT is a profilometer with a 4-inch stage, software-controlled movement, a 12.5-micron stylus diameter, and an included enclosure.

    CategoryMetrology & InspectionWafer2 in, 4 in, 6 in, 8 in
    25 specs