Waferpedia

Tool family

Blue M IGF

Blue MThermal / Diffusion2 entries
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Models in this family

  1. IGF 6680 F 4

    The Blue M IGF 6680 F 4 is a gas oven with a digital programmable controller, an overtemperature controller, inert gas input, and a maximum temperature of 593°C.

  2. IGF 77806 MP

    The Blue M IGF 77806 MP is an oven used for silicon heat treat.

All entries

  1. IGF 6680 F 4Blue M

    The Blue M IGF 6680 F 4 is a gas oven with a digital programmable controller, an overtemperature controller, inert gas input, and a maximum temperature of 593°C.

    CategoryThermal / Diffusion
    4 specs
  2. IGF 77806 MPBlue M

    The Blue M IGF 77806 MP is an oven used for silicon heat treat.

    CategoryThermal / Diffusion
    1 spec