Tool family
The Applied Materials Centura DPS Poly Etcher is a decoupled plasma source etching tool for 6-inch wafers.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Centura DPS II | DPS II | — | Redesigned source coil geometry and top cover for improved plasma uniformity on 300mm wafers; upgraded gas distribution system and more flexible RF pulse function. | chinsortech.com[1] |