AJA A300-XP

Models in this family

1. 

   A300-XP

   The A300-XP is an AJA UHV magnetron sputtering source series described as an expanded-performance version of the A300 series.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   A320-XP	—	—	Typical 2" UHV source with in-situ tilt, pneumatic shutter, gas ring, conical chimney, and integral gas injection.	web.archive.org[1]
   A330-XP	—	—	UHV magnetron sputter source with in-situ tilt shown in a con-focal orientation for uniform deposition onto 150 mm diameter substrates.	web.archive.org[1]
   A340-XP	—	—	4" target UHV magnetron sputtering source on 8" CF rotatable flange with chimney, gas ring, and pneumatic shutter.	web.archive.org[1]
   A310 Series (A310-XP)	—	—	Miniature UHV source fitting through 2.75" CF flange; full ceramic-to-metal construction; target changes by one hand; ideal for surface science and substrates up to 2" Ø	web.archive.org[1]

Sources