Comparison ledger
Varian 160 XP Ion, Varian EHP 500 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 160 XP IonVarian | EHP 500 IonVarian |
|---|---|---|
| OEM | Varian | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 160 XP Ion | Varian EHP 500 Ion |
| Specifications | ||
| Configuration | 150mm High Current IMP[1] | SMIF[3] |
| OEM | Varian[2] | — |
| Model | 160 XP Ion[2] | — |
| Category | Ion Implantation[1] | — |
| Tool type | ion implanter[1] | — |
| Software version | — | 13.42.18[3] |
| CIM | — | GEM and SECS[3] |
| Handler | — | End station PP+ with both Load Lock[3] |
| Wafer size | — | 8 inch[3] |
| Handler / End station | — | End station PP+ with both Load Lock[3] |
| SMIF | — | Included[3] |
| Scrubber Exhaust | — | Included[3] |
| 2 Stage Rough Pump | — | Included[3] |
| Load Lock Rough Pump | — | Included[3] |
| Vintage year | — | 1998[3] |
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