Waferpedia

Comparison ledger

SEZ DV 34versusSEZ DV 34 BF

Lam Research SEZ DV 34, Lam Research SEZ DV 34 BF, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SEZ DV 34Lam Research
SEZ DV 34 BFLam Research
OEMLam ResearchLam Research
Category—Etch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research SEZ DV 34Lam Research SEZ DV 34
Specifications
ConfigurationChambers (4)[1]2 LP[4]
Wafer Sizes8 inch, 12 inch[1]—
Chambers4[1]—
Vintage2007[3]—
Category—Etcher[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]Equipment inventory listing
  4. [4]inventory listing