Comparison ledger
KLA .496 PSL Wafer, Onto Innovation RPM 2000 PL Mapper, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | RPM 2000 PL MapperOnto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 2" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Onto Innovation RPM 2000 PL Mapper |
| Specifications | ||
| Configuration | NIST Traceable[1] | 785nm and almost new 532nm lasers (suitable for most As-P materials)[3] |
| Wafer size | 8 inch[1] | 2"-6" wafer size range[3] |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| OEM | — | ONTO / Nanometrics[3] |
| Model | — | RPM 2000[3] |
| Wafer sizes | — | 2, 3, 4, 5, 6 inch[3] |
| Wafer chuck | — | 2" and 3" wafer chuck[4] |
| Laser wavelength | — | 785nm and almost new 532nm lasers[3] |
| Detectors | — | InGaAs and Si CCD detectors[3] |
| Light source | — | White light source[3] |
| Measurement applications | — | Thickness, VCSEL, DBR measurements[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →