Comparison ledger
Brooks 017-0146-01 Prealigner, SUSS MicroTec BA8 Gen4 Pro, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | BA8 Gen4 ProSUSS MicroTec |
|---|---|---|
| OEM | Brooks | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | Gen4 Pro |
| Family | Brooks 017-0146-01 Prealigner | SUSS MicroTec BA8 Gen4 Pro |
| Specifications | ||
| Wafer size | — | up to 200 mm[1] |
| Automation level | — | Semi-automated[1] |
| Processes | — | Mask alignment, Bond alignment, Exposure, UV bonding, Fusion bonding, Micro- and Nanoimprinting, Selective plasma activation[1] |
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