Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Applied Materials P 5000 MxP+, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | P 5000 MxP+Applied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Applied Materials P 5000 MxP+ |
| Specifications | ||
| OEM | Applied Materials[1] | Applied Materials[4] |
| Model | 0010-16392[1] | P 5000 MxP+[3] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Voltage | — | 208 V, 125.0 A, 50/60 Hz, 3 Phase[3] |
| Largest Load Ampere Rating | — | 125 Amps[3] |
| MAximum Ampere Rating | — | 90 KVA[3] |
| Full Load Current | — | 250 Amps[3] |
| Interrupt Current | — | 10,000 Amps I.C.[3] |
| Wafer Set Size | — | 8"[3] |
| Chamber A | — | MxP+ Etch[3] |
| Chamber B | — | MxP+ Etch[3] |
| Chamber C | — | MxP+ Etch[3] |
| Configuration | — | Chamber A:[3] |
| RF Generator | — | OEM 12 B[3] |
| Baraton | — | 1 Torr[3] |
| Slit Valve | — | Standard[3] |
| Baratron | — | 1 Torr[3] |
| Make | — | Applied Materials[3] |
| Category | — | Etcher[3] |
| Wafer sizes | — | 8, 6 inch[3] |
| Wafer set size | — | 6"[4] |
| Chamber A RF generator | — | OEM 12 B[3] |
| Chamber B RF generator | — | OEM 12 B[3] |
| Chamber C RF generator | — | 12 B[3] |
| Electrical requirement | — | Line voltage 200/208 V[3] |
| Mainframe type | — | Standard[3] |
| Robot type | — | MK II[3] |
| Load lock cassette | — | Manual 2 Cassette[3] |
| Storage elevator | — | 15 slots[3] |
| Power rack | — | Shrink[3] |
| Line Frequency | — | 50/60 Hz[3] |
| Line Voltage | — | 200/208 V[3] |
| Line Amperage | — | 123 Amps[3] |
| 3rd Monitor | — | Penulator[3] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →