Comparison ledger
KLA .496 PSL Wafer, KLA P 16 Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P 16 SurfaceKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | KLA P |
| Specifications | ||
| Configuration | NIST Traceable[1] | Windows XP[3] |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Phase | — | 1 Phase[4] |
| Operating System | — | Windows XP[5] |
| Extended range | — | 1 mm[5] |
| 3D option | — | Yes[5] |
| Instrument type | — | Mechanical profilometer[5] |
| Vertical resolution | — | 0.6 Å[6] |
| Lateral resolution | — | 0.5 µm[6] |
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