Comparison ledger
Blue M 0 V 500, Tokyo Electron Alpha 8 SE D, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 V 500Blue M | Alpha 8 SE DTokyo Electron |
|---|---|---|
| OEM | Blue M | Tokyo Electron |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 V 500 | Tokyo Electron Alpha |
| Specifications | ||
| Configuration | — | High Temp Oxide[1] |
| System Type | — | L Type[1] |
| Heater Model | — | VMU-40-007EX (1200 Deg C)[1] |
| Cassette I/O Type | — | Normal I/O Type[1] |
| AGV Compatibility | — | Unable[1] |
| System Main Controller | — | Waves[1] |
| Mechanical Controller | — | Waves[1] |
| Sequence Controller | — | Waves[1] |
| Gas Controller | — | Waves[1] |
| Gas Flow Chart Panel | — | Installed (Front, Rear)[1] |
| Optional Panel | — | Installed (Front, Rear)[1] |
| Signal Tower / Colors | — | Installed, 3 colors[1] |
| Furnace Temperature Controller | — | 560 A[1] |
| Furnace Overtemp Detector | — | Fenwal / MDMR-5FR[1] |
| Gas Detector | — | GD-K 7 D 4[1] |
| Detecting Gas | — | Hcl, N2O[1] |
| User Host Computer I/F | — | SECS[1] |
| Process Gas | — | N2, O2, H2, N2O[1] |
| Basic Style | — | Integrated Gas System (Fujikin)[1] |
| Process | — | Hi Temp Oxide[2] |
| OEM | — | Tel[1] |
| Model | — | Alpha 8 SE D[1] |
| Equipment type | — | Furnace[1] |
| Wafer size | — | 6 inch[1] |
| Vintage | — | 2006[1] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →