Comparison ledger
ASML Twinscan NXT 1980 Di Immersion, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000 FamilyUltratech | |
|---|---|---|
| OEM | ASML | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML Twinscan NXT 1980 Di Immersion | Ultratech 1000 Family |
| Specifications | ||
| Manufacturer | ASML[1] | — |
| Model | Twinscan NXT 1980 Di[1] | — |
| Category | Lithography[2] | — |
| Wafer size | 12 inch[1] | — |
| Platform architecture | NXT3 immersion technology[4] | — |
| Overlay accuracy | <1.5 nm (3σ)[4] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[5] |
| Optical design | — | Wynne Dyson[5] |
| Magnification | — | 1X[5] |
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