Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Applied Materials Centura AP Enabler Dielectric, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Centura AP Enabler DielectricApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Etch | Etch |
| Wafer size | — | Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Applied Materials Centura |
| Cited variants | — |
|
| Specifications | ||
| OEM | Applied Materials[2] | — |
| Model | 0010-16392[2] | — |
| Type | ESC Assembly[2] | — |
| Wafer Size | 300 mm[3] | Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch[4] |
| Electrode Configuration | Dual[3] | — |
| Configuration | — | HDD not included[4] |
| Online Connection | — | GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)[4] |
| Inter Face | — | 3 carrier stage (Continuous flow operation) w/ 3 Loadports (Semi compliant[4] |
| Interface A | — | Hardware related to EDA[4] |
| Corrosion Resistant FI & SWLL | — | N/A[4] |
| Loader Mod Corrosion Prevent | — | N/A[4] |
| Standard SWLL | — | Standard SWLL[4] |
| Side Storage Pod | — | Side Storage Pod (Left/Right)[4] |
| OCR | — | KIT, YAT BACKSIDE OCR, 300MM 5.3FI[4] |
| Facility Plate | — | N2 Regulator : Supplied by customer in floor, CDA regulator 125 PSI onboard[4] |
| Transfer Pressure Monitor | — | 10 Torr Manometer and 1SLM N2 APC, kit[4] |
| Load Lock Pressure Monitor | — | GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog[4] |
| Transfer Chamber Blade Kit | — | Transfer Chamber Accelerator Blade Kit[4] |
| LL ISO-Slit Valve Grp Elast. | — | AP Chemraz 513 Elastomer[4] |
| Interface | — | 3 carrier stage (Continuous flow operation) w/ 3 Loadports (Semi compliant[4] |
| Atmospheric Robot | — | KAWASAKI A3[4] |
| Mainframe Robot | — | VXP with Dual blade[4] |
| Loadport Type | — | Enhanced 25 wafer FOUP[4] |
| Loadports | — | Loadport System[4] |
| EMO Type | — | Turn to Release (Front x3, Rear x4) - 3 on FI, 1 on front of FI and one on each side of FI. Rear: 1 for each process chamber.[4] |
| System Monitors | — | Monitor #1 is Flat Panel with Keyboard on stand / Monitor #2 is through the wall flat panel (optional)[4] |
| Voltage | — | 208V, 50/60Hz[4] |
| Vintage | — | 2010[4] |
| Description | — | Dielectric Etch[5] |
| Version | — | 300mm[6] |
| Process Chambers | — | 4 process chambers[1] |
| Fab Interface Type | — | Centura Etch 5.3 FAC. Frame 5.3 Fi Rev 002[1] |
| RF Gen Top (162MHz Source) | — | 3500W RF POWER SUPPLY, 162 MHZ, FIXED FREQUENCY, 208VAC, WATER COOLED (0190-29389)[1] |
| RF Gen #1 Bottom (13MHz Bias) | — | RF GENERATOR, 13MHZ 5KW, 300MM, RACK MOUNT (0190-15319)[1] |
| RF Gen #2 Bottom (2MHz Bias) | — | RF GEN PLASMA 9KW 2MHZ ENI (0190-29586)[1] |
| Endpoint Type | — | Endpoint type (Eye-D) (0246-00196)[1] |
| TMP | — | Shimadzu D3403M, 3000 litre TMP[1] |
| Dry Pump | — | N(ESR80WN (EBARA); customer Supply)[1] |
| Chamber Controller Module | — | SBC C400MHZ, 3U CPCI, 256MB RAM[1] |
| Gas Line 1 | — | C4F6 100 sccm UNIT IFC-125[1] |
| Gas Line 2 | — | CH2F2 100 sccm UNIT IFC-125[1] |
| Gas Line 3 | — | C3F8 50 sccm UNIT IFC-125[1] |
| Gas Line 4 | — | O2_M 300 sccm UNIT-125[1] |
| Gas Line 5 | — | SO2 200 sccm UNIT IFC-125[1] |
| Gas Line 6 | — | CF4 200 sccm UNIT IFC-125[1] |
| Gas Line 7 | — | C4F6_IGI 5 sccm UNIT-125[1] |
| Gas Line 8 | — | O2_IGI 5 sccm UNIT-125[1] |
| Gas Line 9 | — | O2_L 50 sccm UNIT-125[1] |
| Gas Line 10 | — | O2_H 5000 sccm UNIT-125[1] |
| Gas Line 11 | — | Ar 2000 sccm UNIT-125[1] |
| Gas Line 12 | — | N2 200 sccm UNIT-125[1] |
| Gas Line 13 | — | CHF3 200 sccm UNIT-125[1] |
| Gas Line 14 | — | C4F8 100 sccm UNIT-125[1] |
| Source Bottom Ring | — | QUARTZ RING SOURCE, E5 (0200-07362)[1] |
| Showerhead Assy | — | Showerhead Assy, 4mm SiC Top Electrode Tokai (0041-32335)[1] |
| Wafer Pass Through | — | Not available[4] |
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