Wafer size
6 in
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2 entries
- EvoVacAngstrom Engineering
The Angstrom Engineering EvoVac is a load-locked PVD tool for electron-beam evaporation, with additional resistive thermal evaporation, ion-assisted deposition, and sputter deposition capabilities.
CategoryDepositionWafer6 in - ATC OrionAJA
The AJA ATC Orion 8 UHV Sputtering System is a physical vapor deposition tool that deposits films on a substrate using magnetron sputtering.
CategoryDepositionWafer6 in
