Comparison ledger
SUSS MicroTec ACS300 Gen3, SUSS MicroTec AD12, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ACS300 Gen3SUSS MicroTec | AD12SUSS MicroTec |
|---|---|---|
| OEM | SUSS MicroTec | SUSS MicroTec |
| Category | — | — |
| Wafer size | 300mm | 300mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | Gen3 | — |
| Family | SUSS MicroTec ACS300 Gen3 | SUSS MicroTec AD12 |
| Specifications | ||
| System type | Automated[1] | — |
| Max wafer size | 300 mm[1] | — |
| Process capabilities | Priming, Spin Coating, Baking, Aqueous / Solvent Developing[1] | — |
| Operation | — | Manual[1] |
| Wafer size | — | 300 mm[1] |
| Process type | — | Aqueous[1] |
| Capabilities | — | Puddle developing, Spray developing, Wafer cleaning[1] |