Waferpedia

Comparison ledger

WL-1160versusPM5

Signatone WL-1160, SUSS MicroTec PM5, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
WL-1160Signatone
PM5SUSS MicroTec
OEMSignatoneSUSS MicroTec
CategoryTest & ProbeTest & Probe
Wafer size150mm150mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySignatone WL-1160SUSS MicroTec PM5
Specifications
Product typeRF / Microwave Probe Station[1]—
Application focushigh-frequency, high-power, and millimeter wave applications[1]—
Operating characteristicnon-resonant operation is critical[1]—
Chuck sizes150mm and 200mm chucks[1]—
Calibration chuckIndependent calibration chuck located adjacent to the main chuck[1]—
Calibration chuck materialNon-resonant polymer[1]—
Microscope stage2" x 2" microscope stage[1]—
Microscope compatibilitySupports most StereoZoom and high-powered microscopes[1]—
Platform sharingUses the same stable platform as the S-1160 multipurpose probe station[1]—
X-Y motion control150mm & 200mm manual X-Y motion control[1]—
Microscope stage control50mm X 50mm microscope stage control[1]—
Height controlSeparate contact / separate and platen height control[1]—
Z motionUp to 30mm Z motion control of platen[1]—
Micropositioner capacityHolds up to four S-96MW microwave micropositioners[1]—
Standard manifoldsVacuum and DC manifolds standard[1]—
system type—analytical probe system[2]
wafer/substrate diameter—up to 150 mm (6″)[2]
measurement modes—DC and HF measurements[2]
failure analysis use—suitable as a failure analysis tool[2]
probe heads—up to 12 SUSS probe heads at one time[2]
manipulator probe function—nanowires may be picked and placed onto a device or substrate[2]
Measurement types—DC and HF[2]
Max probe heads—up to 12 SUSS probe heads[2]
Manipulator probe—for nanowire pick-and-place[2]
Wafer/substrate diameter—up to 150 mm (6 in)[2]
Failure analysis—suitable as a failure analysis tool[2]
Contact points—up to 4 contact points can be operated independently at the same time[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]uwaterloo.cauwaterloo.ca
  3. [3]polifab.polimi.itpolifab.polimi.it