Comparison ledger
Semitool 880, Semitool 880 S M-Tek SRD, Semitool 880 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 880Semitool | 880 S M-Tek SRDSemitool | 880 SRDSemitool |
|---|---|---|---|
| OEM | Semitool | Semitool | Semitool |
| Category | Spin Rinser/Dryer | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | 4" | — | — |
| Process node | — | — | — |
| Introduced | — | — | — |
| Production run | — | — | — |
| Lifecycle | — | — | — |
| Lifecycle milestones | — | — | — |
| Control system | — | — | — |
| Generation | — | — | — |
| Family | Semitool 880 | Semitool 880 | Semitool 880 |
| Specifications | |||
| Function | Spin Rinser/Dryer[1] | — | — |
| Boat compatibility | 4" and 5" mask boats, plus 6" wafer boat on request[1] | — | — |
| Rinse medium | DI water to 15 MΩ[1] | — | — |
| Drying method | Heated nitrogen[1] | — | — |
| Configuration | — | right hand[2] | Left - Right Door[4] |
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