Comparison ledger
Plasma-Therm Unaxis Versaline ICP, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Unaxis Versaline ICPPlasma-Therm | 1512eTegal |
|---|---|---|
| OEM | Plasma-Therm | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Plasma-Therm Unaxis Versaline ICP | Tegal 1512e |
| Specifications | ||
| Process Chamber | 6" ESC Chuck Type[1] | — |
| ICP type | Inductively Coupled Plasma[1] | — |
| Includes | DSE III, Load Lock Chamber, Transfer Chamber, Process Chamber (6" ESC Chuck), RF Generator Module, Monitor Rack, Chiller Unit[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[2] |
| Stated configuration | — | With modules assembly for CI-4222[2] |
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