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Comparison ledger

TMH 071 P VacuumversusTMH 1001 SG Turbo

Pfeiffer TMH 071 P Vacuum, Pfeiffer TMH 1001 SG Turbo, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMPfeifferPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyPfeiffer TMHPfeiffer TMH
Specifications
OilPM 073 073 -T[1]TL011 65 ml[6]
Supply60 l/s[1]—
Mass2.8 kg[1]40 kg[6]
ManufacturerPfeiffer[1]—
ModelTMH 071 P[1]—
Asset #143047[1]—
Vintage2020[1]1997[6]
Pumping speed60 l/sec for N2[2]—
Inlet flangeDN 63 ISO-K[2]—
Compression ratio (N2)> 10^11[4]—
Ultimate pressure< 7 x 10^-8 Torr[4]—
Typevacuum pump[3]—
ControllerTC 100[5]—
Part numberPMP03195 / PMC01692 / G3170-80061[5]—
Configuration—DN 200 ISO-K, 3P[6]
S(N2)—880 l/s[6]
Pumping Speed (Nitrogen)—880 l/s[6]
Inlet Flange—DN200 ISO-K[6]
Oil Type—TL011[6]
Oil Volume—65 ml[6]
Motor Phase—3P[6]
Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]ajvs.comajvs.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]provac.comprovac.com
  5. [5]ajvs.comajvs.com
  6. [6]inventory listing