Comparison ledger
Perkin Elmer Micralign, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MicralignPerkin Elmer | 150 e MaskSUSS MicroTec |
|---|---|---|
| OEM | Perkin Elmer | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | 2-inch, 2.5-inch, or 3-inch wafers; optionally 4×4-inch, 3.5×3.5-inch, or 3×3-inch masks | — |
| Process node | — | — |
| Introduced | 1973 | — |
| Production run | 1971–1990 | — |
| Lifecycle | Discontinued | — |
| Lifecycle milestones | 1990 Divestiture | — |
| Control system | — | — |
| Generation | — | — |
| Family | Perkin Elmer Micralign | SUSS MicroTec 150 e Mask |
| Cited variants | — | |
| Specifications | ||
| OEM | Perkin-Elmer[1] | — |
| Model family | Micralign[1] | — |
| Type | projection aligner[1] | — |
| Introduction year | 1973[1] | — |
| First sold model | Micralign 100[1] | — |
| First sold | 1973[1] | — |
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