Waferpedia

Comparison ledger

306versus357

OAI 306, OAI 357, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
306OAI
357OAI
OEMOAIOAI
CategoryUV intensity meterUV intensity meter
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyOAI 306OAI 357
Specifications
TypeUV Intensity Meter[1]UV intensity meter[1]
Listed location/categoryMAGNETIC MEASUREMENT DEVICES[1]—
ManufacturerOAI (Optical Associates Inc.), Milpitas, California, U.S.A.[2]—
Meter ModelOAI 306 UV Powermeter[2]—
Probe Model / MPN0306-001-04[2]—
Probe Wavelength365 nm[2]—
DisplayLCD, reads in mW/cm²[2]Digital display, NIST traceable[3]
Measurement ModesNORM (real-time intensity), HOLD (freeze reading), PEAK HOLD (maximum intensity captured)[2]—
Power Source9V Alkaline battery[2]—
Form FactorHandheld[2]—
Measurement capabilities—Intensity, energy, time[3]
Maximum intensity—1600 mW/cm2[3]
Maximum energy—4000 mJ/cm2[3]
Maximum time—2.5 seconds[3]
Wavelengths—365 nm and 436 nm[3]
Probe included—365 nm probe[3]
Output—RS-232[3]
Housing—Rugged aluminum case with handle and probe pouch[3]
Original application—ASML and GCA (Integrated Solutions) wafer steppers; also for ASML, Nikon, Canon steppers[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]recycledgoods.comrecycledgoods.com
  3. [3]amazon.comamazon.com