Comparison ledger
Nikon 1505, Nikon 1505 G 6 E, Nikon 1505 G 7 E, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1505Nikon | 1505 G 6 ENikon | 1505 G 7 ENikon |
|---|---|---|---|
| OEM | Nikon | Nikon | Nikon |
| Category | — | Lithography | Lithography |
| Wafer size | — | — | — |
| Process node | — | — | — |
| Introduced | — | — | — |
| Production run | — | 1988– | — |
| Lifecycle | — | — | — |
| Lifecycle milestones | — | — | — |
| Control system | — | — | — |
| Generation | — | — | — |
| Family | Nikon 1505 | Nikon 1505 | Nikon 1505 |
| Specifications | |||
| Exposure wavelength | g-line[1] | — | — |
| Numerical aperture | 0.54 NA[1] | — | — |
| Configuration | — | 5" reticle[2] | 5" reticle[4] |
| Resolution | — | 650 nm[3] | — |
| Numerical Aperture | — | 0.54[3] | — |
| Reduction | — | 5x[3] | — |
| Exposure Field | — | 15 x 15 mm[3] | — |
| Alignment Accuracy | — | 130 nm[3] | — |
| Wafer Size | — | 4 inch[2] | — |
| Light Source | — | g-line[1] | — |
| Introduction Year | — | 1988[3] | — |
| NA (Numerical Aperture) | — | 0.54[3] | — |
| Make | — | Nikon[2] | — |
| Model | — | 1505 G 6 E[2] | — |
| Category | — | Stepper[2] | — |
| Wafer Sizes | — | 4 inch[2] | — |
| Exposure type | — | g-line[3] | — |
| NA | — | 0.54[3] | — |
| Exposure field | — | 9.3 x 18.8 mm[3] | — |
| Wafer size | — | — | 6 inch[4] |
| Reticle size | — | — | 5 inch[4] |