Comparison ledger
Mattson Steag / AST 2800 RTP, Mattson Steag / AST Heatpulse 610 RTP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Steag / AST 2800 RTPMattson | |
|---|---|---|
| OEM | Mattson | Mattson |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Mattson Steag | Mattson Steag |
| Specifications | ||
| Configuration | Missing parts[1] | — |
| Phase | 3 Phase[2] | — |
| Frequency | 50 Hz[2] | — |
| Voltage | 208V[2] | — |
| Model | 2800[1] | — |
| Make | Mattson / Steag / AST[1] | — |
| Asset # | 83206[1] | — |
| Temperature range | — | 400-1250° C[4] |
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