Comparison ledger
Mattson AST 2800 SMIF RTP, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AST 2800 SMIF RTPMattson | |
|---|---|---|
| OEM | Mattson | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Mattson AST 2800 | Varian 0332 F 9453 302 Diffusion |
| Specifications | ||
| Phase | 3 phase[1] | — |
| Software | DOS 2.0[1] | — |
| CIM | GEM[1] | — |
| Configuration | PRI Robot ATM307[1] | — |
| Manufacturer | Mattson[1] | — |
| Model | AST 2800 SMIF[1] | — |
| Tool type | Rapid Thermal Process (RTP) system[1] | — |
| Category | Thermal / Diffusion[2] | — |
| Wafer size | 8 inch[1] | — |
| Power | 3 phase[1] | — |
| Wafer handling | PRI Robot ATM307[2] | — |
| Configuration / option | PRI Aligner[1] | — |
| Vintage | 1996[1] | — |
| Asset Number | — | 142841[3] |
| Last Confirm Date | — | October 14, 2025[4] |
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