Waferpedia

Comparison ledger

15 LapperversusDSS 200 Series II Post

Lapmaster 15 Lapper, Ontrak DSS 200 Series II Post, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
15 LapperLapmaster
OEMLapmasterOntrak
CategoryCMPCMP
Wafer size——
Process node——
Introduced—2023
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 15Ontrak DSS 200
Specifications
Number Of Conditioning RingsUp to 3[1]—
Ring IDUp to 5.5″[1]—
Plate Diameter – Outside15″[1]—
Plate Diameter – Inside3 1/2″[1]—
Standard RPM60[1]—
Drive Motor1/2 HP[1]—
Electrics110V / 1Ph / 60Hz[1]—
Dimensions – Approximate26″(L-R) x 21″(F-B) x 22″(H)[1]—
ConfigurationEquipped with:[1]50/60 Hz[2]
Equipped with: 15″ Cast Iron PlateIncluded[1]—
Equipped with: (3) Yoke/Roller Bearing AssembliesIncluded[1]—
Equipped with: (3) Conditioning RingsIncluded[1]—
Equipped with: (3) Hold DownsIncluded[1]—
Equipped with: 30 Minute TimerIncluded[1]—
Voltage—200/ 208 / 220 VAC[2]
Breaker—25 A (5.2 kW)[2]
Total FLA—6.8 A (1.4 kW)[2]
Largest Load—3.6 A (0.8kW)[2]
CDA (Clean Dry Air)—80-100 PSI (Inlet)[2]
DI Water—60-80 PSI (Inlet)[2]
Process Solutions / Chems—15 PSI (Inlet)[2]
Drain—132 GpH Peak, 60 GpH Idle, 2" CPVC[2]
Noise Level—70 dB (during process)[2]
Total FL—6.8 A (1.4 kW)[3]
Largest load—3,6A (0,8kW)[4]
Process solutions/chems—15PSI (Inlet), 1/4" OD Teflon tubing[4]
Wafer Sizes—8 inch[2]
CDA (Clean Dry Air) Inlet—80-100 PSI, 3/8" OD Tubing[2]
DI Water Inlet—60-80 PSI, 3/4" OD Teflon Tubing[2]
Process Solutions / Chems Inlet—15 PSI, 1/4" OD Teflon Tubing[2]
Wafer Size—8 inch[2]
CDA Inlet Pressure—80-100 PSI[2]
CDA Tubing—3/8" OD[2]
DI Water Inlet Pressure—60-80 PSI[2]
DI Water Tubing—3/4" OD Teflon[2]
Process Solutions / Chems Pressure—15 PSI[2]
Process Solutions / Chems Tubing—1/4" OD Teflon[2]
Drain Flow (Peak)—132 GpH[2]
Drain Flow (Idle)—60 GpH[2]
Drain Pipe Size—2" CPVC[2]
Noise Level (during process)—70 dB[2]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing